The Ashcroft Si-Glas sensor now enables precise measurement and control of very low pressure. Although the ultra-thin silicon diaphragm deflects only a micron, the sensor is 100 times more sensitive to pressure than available silicon piezoresistive pressure sensors.  The Si-Glas sensor is composed of only sputtered metals and glass molecularly bonded to silicon. There are no epoxies or other organics in the sensor to contribute to drift or mechanical degradation over time. The glass-clad silicon diaphragm withstands extreme overpressure as well as severe shock and vibration.